Abstract: Objective: To fabricate micro/nanostructures on titanium surface and analyze effects of hierarchical titanium surface on its biocompatibility. Methods: Mixed alkali treatment on the titanium surface was conducted after sandblast and acid etching, then scanning electronic microscope (SEM) and the X-ray energy dispersive spectrometer (EDS) were used to investigate microstructures of the titanium coatings. Survival rate of L-929 cells were detected by CCK-8 kit. The adherent cells of each group were stained by DAPI, while the proliferation of preosteoblast of each group was investigated further. Results: On the hierarchical structures of titanium surface, the scale of micro pit was about 3-5μm, while the nanostructure was about 100-200nm. Sodium and calcium were found on the new type surface. Cell toxicity was Class 0. Adhesion assay showed that the number of adherent cells both on MTi and NTi were bigger than that of STi, while cells on NTi were most at 1 hour or 2 hours. Proliferation test displayed that the proliferation activity on MTi was significantly lower than that on STi at day 1, 4, 7, while the proliferation activity on NTi was higher than that on STi at day 7. Conclusion: Hierarchical structure shows more biocompatible structure and better activity of adhesion and proliferation.